Entegris and JSR enter cross-licensing deal for EUV lithography tech
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Entegris and JSR Corporation/Inpria Corporation Announce Non-Exclusive Cross-Licensing to EUV Lithography
May 26, 2026 7:10 PM EDTBILLERICA, Mass. & TOKYO--(BUSINESS WIRE)-- Entegris, Inc. (Nasdaq: ENTG), a global leader in advanced materials and purity solutions for the semiconductor industry, and JSR Corporation, a materials innovation leader and the parent company of Inpria Corporation, today announced entry into a non-exclusive cross-licensing agreement aimed at helping the semiconductor industry advance extreme ultraviolet (EUV) lithography for next generation chip manufacturing.
As the industry moves to smaller nodes, materials innovation, performance, purity, and reliability become inseparable, said Olivier Blachier, SVP Chief Strategy & Innovation Officer at Entegris. This cross-licensing reflects how innovation in semiconductors increasingly happens... More
